Inventor
TEGENBOSCH HENRICUS GERARDUS
NL10 patents
⚠️ This page may combine multiple inventors who share the name “TEGENBOSCH HENRICUS GERARDUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
8 patentsUS7362415B2Apr 22, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV15 citations80
US7486384B2Feb 3, 2009
Lithographic support structure
ASML NETHERLANDS BV11 citations77
US12007699B2Jun 11, 2024
Vessel for a radiation source
ASML NETHERLANDS BV2 citations71
US7382440B2Jun 3, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations60
US12389519B2Aug 12, 2025
Guiding device and associated system
ASML NETHERLANDS BV0 citations57
US10955749B2Mar 23, 2021
Guiding device and associated system
ASML NETHERLANDS BV0 citations57
US11822252B2Nov 21, 2023
Guiding device and associated system
ASML NETHERLANDS BV1 citations56
US7184128B2Feb 27, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations49