Inventor
KESSELS LAMBERTUS GERARDUS MAR
NL4 patents
Patents
4 patentsUS7362415B2Apr 22, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV15 citations80
US7317510B2Jan 8, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV18 citations78
US7209216B2Apr 24, 2007
Lithographic apparatus and device manufacturing method utilizing dynamic correction for magnification and position in maskless lithography
ASML NETHERLANDS BV4 citations58
US7321416B2Jan 22, 2008
Lithographic apparatus, device manufacturing method, device manufactured thereby, and controllable patterning device utilizing a spatial light modulator with distributed digital to analog conversion
ASML NETHERLANDS BV1 citations46