Inventor

YAKUSHEV OLEG

RU3 patents

⚠️ This page may combine multiple inventors who share the name “YAKUSHEV OLEG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

1 patent

US7825390B2Nov 2, 2010

Apparatus with plasma radiation source and method of forming a beam of radiation and lithographic apparatus

ASML NETHERLANDS BV0 citations45

GLUSHKOV DENIS ALEXANDROVICH

1 patent

US9307624B2Apr 5, 2016

Lithographic apparatus

GLUSHKOV DENIS ALEXANDROVICH0 citations42

KRIVTSUN VLADIMIR MIHAILOVITCH

1 patent

US8294128B2Oct 23, 2012

Apparatus with plasma radiation source and method of forming a beam of radiation

KRIVTSUN VLADIMIR MIHAILOVITCH0 citations42