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Inventor
OTAKA AKINOBU
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “OTAKA AKINOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MORIKAWA YUJI
2 patents
US8164028B2
Apr 24, 2012
Resistance heater
MORIKAWA YUJI
1 citations
47
US8993939B2
Mar 31, 2015
Resistance heater
MORIKAWA YUJI
0 citations
46
MOMENTIVE PERFORMANCE MAT INC
1 patent
US7397648B2
Jul 8, 2008
Electrostatic chuck including a heater mechanism
MOMENTIVE PERFORMANCE MAT INC
7 citations
69