Inventor
SHEN CHIA-I
TW7 patents
⚠️ This page may combine multiple inventors who share the name “SHEN CHIA-I”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
5 patentsUS10669625B2Jun 2, 2020
Pumping liner for chemical vapor deposition
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10008367B2Jun 26, 2018
Gas diffuser unit, process chamber and wafer processing method
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71
US12394602B2Aug 19, 2025
Wafer processing method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10741366B2Aug 11, 2020
Process chamber and wafer processing method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US9048268B2Jun 2, 2015
Method and equipment for removing photoresist residue after dry etch
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations44