Inventor
EGLEY FRED DENNIS
US5 patents
⚠️ This page may combine multiple inventors who share the name “EGLEY FRED DENNIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
3 patentsUS10306776B1May 28, 2019
Substrate processing system printed-circuit control board assembly with one or more heater layers
LAM RES CORP1 citations59
US9279731B2Mar 8, 2016
Multichannel thermocouple compensation for three dimensional temperature gradient
LAM RES CORP2 citations59
US10119867B2Nov 6, 2018
Multichannel thermocouple compensation for three dimensional temperature gradient
LAM RES CORP1 citations48