Inventor

BALASUBRAMANIAM PALANIVEL

US4 patents

⚠️ This page may combine multiple inventors who share the name “BALASUBRAMANIAM PALANIVEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHARTERED SEMICONDUCTOR MFG

2 patents

US6200887B1Mar 13, 2001

Method to form a smooth gate polysilicon sidewall in the fabrication of integrated circuits

CHARTERED SEMICONDUCTOR MFG10 citations68

US6312999B1Nov 6, 2001

Method for forming PLDD structure with minimized lateral dopant diffusion

CHARTERED SEMICONDUCTOR MFG13 citations65

YIN CHUNSHAN

1 patent

US8633081B2Jan 21, 2014

Modifying growth rate of a device layer

YIN CHUNSHAN0 citations48

GLOBALFOUNDRIES INC

1 patent

US10325824B2Jun 18, 2019

Methods, apparatus and system for threshold voltage control in FinFET devices

GLOBALFOUNDRIES INC0 citations39