Inventor

YOO WOO SIK

US54 patents

⚠️ This page may combine multiple inventors who share the name “YOO WOO SIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WAFERMASTERS INC

45 patents

US6271459B1Aug 7, 2001

Heat management in wafer processing equipment using thermoelectric device

WAFERMASTERS INC86 citations98

US6410455B1Jun 25, 2002

Wafer processing system

WAFERMASTERS INC50 citations96

US6379073B1Apr 30, 2002

Adjustable joint for a positionable arm

WAFERMASTERS INC69 citations96

US6591161B2Jul 8, 2003

Method for determining robot alignment

WAFERMASTERS INC55 citations95

US6516244B1Feb 4, 2003

Wafer alignment system and method

WAFERMASTERS INC59 citations95

US7276457B2Oct 2, 2007

Selective heating using flash anneal

WAFERMASTERS INC26 citations93

US7198677B2Apr 3, 2007

Low temperature wafer backside cleaning

WAFERMASTERS INC23 citations93

US6932561B2Aug 23, 2005

Power generation system

WAFERMASTERS INC39 citations93

US6887803B2May 3, 2005

Gas-assisted rapid thermal processing

WAFERMASTERS INC24 citations93

US6809035B2Oct 26, 2004

Hot plate annealing

WAFERMASTERS INC23 citations93

US6345150B1Feb 5, 2002

Single wafer annealing oven

WAFERMASTERS INC41 citations93

US6337467B1Jan 8, 2002

Lamp based scanning rapid thermal processing

WAFERMASTERS INC27 citations93

US6303906B1Oct 16, 2001

Resistively heated single wafer furnace

WAFERMASTERS INC31 citations93

US6246031B1Jun 12, 2001

Mini batch furnace

WAFERMASTERS INC24 citations93

US6212088B1Apr 3, 2001

Modular voltage adapter and method for using same

WAFERMASTERS INC36 citations93

US6602797B2Aug 5, 2003

Wafer processing method

WAFERMASTERS INC24 citations92

US6568899B1May 27, 2003

Wafer processing system including a robot

WAFERMASTERS INC45 citations92

US6394523B1May 28, 2002

Portable enclosure for semiconductor processing

WAFERMASTERS INC37 citations92

US6240729B1Jun 5, 2001

Converting thermal energy to mechanical motion

WAFERMASTERS INC30 citations92

US7362426B1Apr 22, 2008

Raman and photoluminescence spectroscopy

WAFERMASTERS INC11 citations84

US7358200B2Apr 15, 2008

Gas-assisted rapid thermal processing

WAFERMASTERS INC9 citations84

US6952889B2Oct 11, 2005

Forced convection assisted rapid thermal furnace

WAFERMASTERS INC14 citations84

US6840763B2Jan 11, 2005

Wafer processing apparatus

WAFERMASTERS INC14 citations84

US6349546B1Feb 26, 2002

Liquid gas exchanger

WAFERMASTERS INC14 citations84

US7599048B2Oct 6, 2009

Optical emission spectroscopy process monitoring and material characterization

WAFERMASTERS INC11 citations83

US7262918B1Aug 28, 2007

Light beam conditioner

WAFERMASTERS INC12 citations83

US6636626B1Oct 21, 2003

Wafer mapping apparatus and method

WAFERMASTERS INC13 citations83

US6879778B2Apr 12, 2005

Batch furnace

WAFERMASTERS INC13 citations82

US7564547B2Jul 21, 2009

Spectroscopy system

WAFERMASTERS INC7 citations74

US7507667B2Mar 24, 2009

Selective heating using flash anneal

WAFERMASTERS INC5 citations74

US7440094B2Oct 21, 2008

Optical sample characterization system

WAFERMASTERS INC8 citations74

US7194199B2Mar 20, 2007

Stacked annealing system

WAFERMASTERS INC8 citations74

US6897162B2May 24, 2005

Integrated ashing and implant annealing method

WAFERMASTERS INC10 citations74

US6790475B2Sep 14, 2004

Source gas delivery

WAFERMASTERS INC9 citations74

US6727194B2Apr 27, 2004

Wafer batch processing system and method

WAFERMASTERS INC11 citations74

US6698718B2Mar 2, 2004

Rotary valve

WAFERMASTERS INC8 citations74

US6633132B2Oct 14, 2003

Plasma gereration apparatus and method

WAFERMASTERS INC10 citations74

US6575739B1Jun 10, 2003

Configurable wafer furnace

WAFERMASTERS INC12 citations74

US6528435B1Mar 4, 2003

Plasma processing

WAFERMASTERS INC7 citations74

US6500737B1Dec 31, 2002

System and method for providing defect free rapid thermal processing

WAFERMASTERS INC11 citations74

US6395648B1May 28, 2002

Wafer processing system

WAFERMASTERS INC7 citations74

US6621943B1Sep 16, 2003

System and method for converting analog data to digital data

WAFERMASTERS INC7 citations73

US7397561B2Jul 8, 2008

Spectroscopy system

WAFERMASTERS INC6 citations63

US7718554B2May 18, 2010

Focused laser beam processing

WAFERMASTERS INC5 citations62

US7141513B2Nov 28, 2006

Integrated ashing and implant annealing method using ozone

WAFERMASTERS INC1 citations52

WAFERMASTERS

2 patents

US6911376B2Jun 28, 2005

Selective heating using flash anneal

WAFERMASTERS29 citations91

US6862404B1Mar 1, 2005

Focused photon energy heating chamber

WAFERMASTERS12 citations83

WAFERMASTER INC

2 patents

US6737361B2May 18, 2004

Method for H2 Recycling in semiconductor processing system

WAFERMASTER INC21 citations91

US7816152B2Oct 19, 2010

In situ, ex situ and inline process monitoring, optimization and fabrication

WAFERMASTER INC7 citations71

(unassigned)

1 patent

US6376806B2Apr 23, 2002

Flash anneal

126 citations98

Showing the top 50 of 54 patents by PatentIndex Score.