Inventor
HISHIYA SHINGO
JP24 patents
⚠️ This page may combine multiple inventors who share the name “HISHIYA SHINGO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
17 patentsUS8896097B2Nov 25, 2014
Method of manufacturing capacitor, capacitor and method of forming dielectric film for use in capacitor
TOKYO ELECTRON LTD16 citations83
US7208428B2Apr 24, 2007
Method and apparatus for treating article to be treated
TOKYO ELECTRON LTD17 citations82
US6821566B2Nov 23, 2004
Method and apparatus for forming insulating film containing silicon oxy-nitride
TOKYO ELECTRON LTD15 citations81
US11786946B2Oct 17, 2023
Cleaning method and film forming apparatus
TOKYO ELECTRON LTD4 citations72
US7563481B2Jul 21, 2009
Method and apparatus for processing polysilazane film
TOKYO ELECTRON LTD2 citations62
US7064084B2Jun 20, 2006
Oxide film forming method
TOKYO ELECTRON LTD4 citations62
US10964530B2Mar 30, 2021
Method of forming blocking silicon oxide film, and storage medium
TOKYO ELECTRON LTD1 citations60
US10553686B2Feb 4, 2020
Method and apparatus for forming silicon oxide film, and storage medium
TOKYO ELECTRON LTD1 citations59
US12438055B2Oct 7, 2025
Abnormality detection method and processing apparatus
TOKYO ELECTRON LTD0 citations58
US12018366B2Jun 25, 2024
Substrate processing apparatus and cleaning method
TOKYO ELECTRON LTD0 citations58
US12334380B2Jun 17, 2025
Boat transfer method and heat treatment apparatus
TOKYO ELECTRON LTD0 citations55
US7259026B2Aug 21, 2007
Method and apparatus for processing organosiloxane film
TOKYO ELECTRON LTD0 citations51
US11725281B2Aug 15, 2023
Gas introduction structure, thermal processing apparatus and gas supply method
TOKYO ELECTRON LTD0 citations50
US10968515B2Apr 6, 2021
Vertical heat treatment apparatus
TOKYO ELECTRON LTD0 citations46
US9776202B2Oct 3, 2017
Driving method of vertical heat treatment apparatus, storage medium and vertical heat treatment apparatus
TOKYO ELECTRON LTD0 citations41
US9562285B2Feb 7, 2017
Film forming method, film forming apparatus and storage medium
TOKYO ELECTRON LTD0 citations41
US7465682B2Dec 16, 2008
Method and apparatus for processing organosiloxane film
TOKYO ELECTRON LTD0 citations41