Inventor
HARRA DAVID J
US10 patents
⚠️ This page may combine multiple inventors who share the name “HARRA DAVID J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN ASSOCIATES
9 patentsUS4512391AApr 23, 1985
Apparatus for thermal treatment of semiconductor wafers by gas conduction incorporating peripheral gas inlet
VARIAN ASSOCIATES147 citations97
US5314597AMay 24, 1994
Sputtering apparatus with a magnet array having a geometry for a specified target erosion profile
VARIAN ASSOCIATES74 citations95
US4714536ADec 22, 1987
Planar magnetron sputtering device with combined circumferential and radial movement of magnetic fields
VARIAN ASSOCIATES135 citations95
US5417833AMay 23, 1995
Sputtering apparatus having a rotating magnet array and fixed electromagnets
VARIAN ASSOCIATES40 citations92
US4392932AJul 12, 1983
Method for obtaining uniform etch by modulating bias on extension member around radio frequency etch table
VARIAN ASSOCIATES35 citations92
US4303251ADec 1, 1981
Flange sealing joint with removable metal gasket
VARIAN ASSOCIATES74 citations91
US4436602AMar 13, 1984
Blocking shield and method for contouring the thickness of sputter coated layers
VARIAN ASSOCIATES23 citations81
US4416759ANov 22, 1983
Sputter system incorporating an improved blocking shield for contouring the thickness of sputter coated layers
VARIAN ASSOCIATES27 citations81
US4392938AJul 12, 1983
Radio frequency etch table with biased extension member
VARIAN ASSOCIATES7 citations73