Inventor
SIERK DENNIS A
US6 patents
Patents
6 patentsUS5497316AMar 5, 1996
Process gas distribution system and method
SCI SYSTEMS INC109 citations97
US5220517AJun 15, 1993
Process gas distribution system and method with supervisory control
SCI SYSTEMS INC89 citations95
US5657254AAug 12, 1997
Process gas distribution system and method with automatic transducer zero calibration
SCI SYSTEMS INC83 citations94
US5508947AApr 16, 1996
Process gas distribution system and method with automatic transducer zero calibration
SCI SYSTEMS INC83 citations94
US5329463AJul 12, 1994
Process gas distribution system and method with gas cabinet exhaust flow control
SCI SYSTEMS INC63 citations93
US4989160AJan 29, 1991
Apparatus and method for controlling functions of automated gas cabinets
SCI SYSTEMS INC73 citations89