Inventor
SUGETA YOSHIKI
JP18 patents
⚠️ This page may combine multiple inventors who share the name “SUGETA YOSHIKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
15 patentsUS6063953AMay 16, 2000
Chemical-sensitization photoresist composition
TOKYO OHKA KOGYO CO LTD90 citations98
US6811817B2Nov 2, 2004
Method for reducing pattern dimension in photoresist layer
TOKYO OHKA KOGYO CO LTD47 citations92
US6022666AFeb 8, 2000
Chemical-sensitization photoresist composition
TOKYO OHKA KOGYO CO LTD21 citations92
US5902713AMay 11, 1999
Chemical-sensitization photoresist composition
TOKYO OHKA KOGYO CO LTD23 citations92
US6042988AMar 28, 2000
Chemical-amplification-type negative resist composition
TOKYO OHKA KOGYO CO LTD20 citations90
US7189499B2Mar 13, 2007
Method of forming fine patterns
TOKYO OHKA KOGYO CO LTD15 citations84
US5955241ASep 21, 1999
Chemical-amplification-type negative resist composition and method for forming negative resist pattern
TOKYO OHKA KOGYO CO LTD19 citations84
US5928837AJul 27, 1999
Negative-working chemical-sensitization photoresist composition comprising oxime sulfonate compounds
TOKYO OHKA KOGYO CO LTD14 citations74
US7235345B2Jun 26, 2007
Agent for forming coating for narrowing patterns and method for forming fine pattern using the same
TOKYO OHKA KOGYO CO LTD9 citations73
US6399275B1Jun 4, 2002
Negative-working photolithographic patterning material and method for the preparation of ion-implanted and metal-plated substrates by using the same
TOKYO OHKA KOGYO CO LTD11 citations68
US5990338ANov 23, 1999
Negative-working chemical-sensitization photoresist composition
TOKYO OHKA KOGYO CO LTD1 citations63
US5973187AOct 26, 1999
Positive-working chemical-sensitization photoresist composition
TOKYO OHKA KOGYO CO LTD1 citations63
US7553610B2Jun 30, 2009
Method of forming fine patterns
TOKYO OHKA KOGYO CO LTD6 citations62
US8043798B2Oct 25, 2011
Method of forming fine patterns
TOKYO OHKA KOGYO CO LTD0 citations52
US7579138B2Aug 25, 2009
Method for forming micropattern
TOKYO OHKA KOGYO CO LTD0 citations49
SUGETA YOSHIKI
3 patentsUS8124318B2Feb 28, 2012
Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent
SUGETA YOSHIKI2 citations60
US8187798B2May 29, 2012
Method of forming fine patterns
SUGETA YOSHIKI0 citations49
US8142980B2Mar 27, 2012
Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent
SUGETA YOSHIKI0 citations48