Inventor
UENO NAOHISA
JP7 patents
⚠️ This page may combine multiple inventors who share the name “UENO NAOHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
5 patentsUS9796953B2Oct 24, 2017
Cleaning liquid for lithography and method for cleaning substrate
TOKYO OHKA KOGYO CO LTD2 citations70
US9291905B2Mar 22, 2016
Developing solution for photolithography, method for forming resist pattern, and method and apparatus for producing developing solution for photolithography
TOKYO OHKA KOGYO CO LTD0 citations50
US9436094B2Sep 6, 2016
Stripping solution for photolithography and pattern formation method
TOKYO OHKA KOGYO CO LTD1 citations49
US7579138B2Aug 25, 2009
Method for forming micropattern
TOKYO OHKA KOGYO CO LTD0 citations49
US9535330B2Jan 3, 2017
Stripping solution for photolithography and pattern formation method
TOKYO OHKA KOGYO CO LTD0 citations46