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Inventor
VITARELLI JAMES
US
2 patents
Patents
2 patents
US6140655A
Oct 31, 2000
Method for water vapor enhanced charged-particle-beam machining
UNIV NORTH CAROLINA STATE
31 citations
88
US5958799A
Sep 28, 1999
Method for water vapor enhanced charged-particle-beam machining
UNIV NORTH CAROLINA STATE
37 citations
88