Inventor

KIM PARK-SONG

KR2 patents

⚠️ This page may combine multiple inventors who share the name “KIM PARK-SONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

1 patent

US6927077B2Aug 9, 2005

Method and apparatus for measuring contamination of a semiconductor substrate

SAMSUNG ELECTRONICS CO LTD4 citations60

SAMSUNG ELECTRIC

1 patent

US6869215B2Mar 22, 2005

Method and apparatus for detecting contaminants in ion-implanted wafer

SAMSUNG ELECTRIC2 citations60