Inventor
DAVIS TIMOTHY DUGAN
US5 patents
Patents
5 patentsUS10338484B2Jul 2, 2019
Recipe selection based on inter-recipe consistency
ASML NETHERLANDS BV10 citations82
US10908513B2Feb 2, 2021
Metrology method and apparatus and computer program
ASML NETHERLANDS BV3 citations68
US11703772B2Jul 18, 2023
Recipe selection based on inter-recipe consistency
ASML NETHERLANDS BV0 citations60
US10901330B2Jan 26, 2021
Recipe selection based on inter-recipe consistency
ASML NETHERLANDS BV0 citations60
US12013647B2Jun 18, 2024
Metrology method
ASML NETHERLANDS BV0 citations59