Inventor
ENGBLOM PETER DAVID
US9 patents
⚠️ This page may combine multiple inventors who share the name “ENGBLOM PETER DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS10338484B2Jul 2, 2019
Recipe selection based on inter-recipe consistency
ASML NETHERLANDS BV10 citations82
US10001711B2Jun 19, 2018
Inspection method, lithographic apparatus, mask and substrate
ASML NETHERLANDS BV3 citations70
US11703772B2Jul 18, 2023
Recipe selection based on inter-recipe consistency
ASML NETHERLANDS BV0 citations60
US10901330B2Jan 26, 2021
Recipe selection based on inter-recipe consistency
ASML NETHERLANDS BV0 citations60
US10394137B2Aug 27, 2019
Inspection method, lithographic apparatus, mask and substrate
ASML NETHERLANDS BV1 citations60
US12013647B2Jun 18, 2024
Metrology method
ASML NETHERLANDS BV0 citations59
US11860548B2Jan 2, 2024
Method for characterizing a manufacturing process of semiconductor devices
ASML NETHERLANDS BV1 citations59