Inventor

MOTOMI KIYOSHI

JP5 patents

Patents

5 patents

US6156477ADec 5, 2000

Polymers and chemically amplified positive resist compositions

SHINETSU CHEMICAL CO33 citations92

US5849461ADec 15, 1998

Chemically amplified positive resist composition

SHINETSU CHEMICAL CO29 citations92

US5750309AMay 12, 1998

Chemically amplified positive resist composition

SHINETSU CHEMICAL CO39 citations92

US5494991AFeb 27, 1996

Polyimides and processes for preparing the same

SHINETSU CHEMICAL CO20 citations90

US5478914ADec 26, 1995

Polyimides and processes for preparaing the same

SHINETSU CHEMICAL CO12 citations71