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Inventor
TSE TOM
US
3 patents
⚠️ This page may combine multiple inventors who share the name “TSE TOM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED MICRO DEVICES INC
2 patents
US6797967B1
Sep 28, 2004
Method and system for dose control during an ion implantation process
ADVANCED MICRO DEVICES INC
29 citations
90
US6960774B2
Nov 1, 2005
Fault detection and control methodologies for ion implantation processes, and system for performing same
ADVANCED MICRO DEVICES INC
10 citations
71
(unassigned)
1 patent
US6428690B1
Aug 6, 2002
Filter module with improved backwash capability
47 citations
86