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Inventor
OBA TOMOFUMI
JP
5 patents
⚠️ This page may combine multiple inventors who share the name “OBA TOMOFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ALPS ELECTRIC CO LTD
2 patents
US7095178B2
Aug 22, 2006
Plasma processing apparatus, method for operating the same, designing system of matching circuit, and plasma processing method
ALPS ELECTRIC CO LTD
58 citations
94
US10026523B2
Jul 17, 2018
Conductor and method of manufacturing the same
ALPS ELECTRIC CO LTD
0 citations
47
FRONTEC INC
2 patents
US5550091A
Aug 27, 1996
Method of sputtering a silicon nitride film
FRONTEC INC
35 citations
92
US5623161A
Apr 22, 1997
Electronic element and method of producing same
FRONTEC INC
8 citations
73
ALPS ALPINE CO LTD
1 patent
US10886037B2
Jan 5, 2021
Conductor and method of manufacturing the same
ALPS ALPINE CO LTD
0 citations
58