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Inventor
LAVU KISHORE
US
2 patents
⚠️ This page may combine multiple inventors who share the name “LAVU KISHORE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
WANG WEI D
1 patent
US8216933B2
Jul 10, 2012
Krypton sputtering of low resistivity tungsten
WANG WEI D
6 citations
80
APPLIED MATERIALS INC
1 patent
US7790604B2
Sep 7, 2010
Krypton sputtering of thin tungsten layer for integrated circuits
APPLIED MATERIALS INC
2 citations
60