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Inventor
MATSUO KAZUTAKA
JP
6 patents
⚠️ This page may combine multiple inventors who share the name “MATSUO KAZUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
2 patents
US6210481B1
Apr 3, 2001
Apparatus and method of cleaning nozzle and apparatus of processing substrate
TOKYO ELECTRON LTD
74 citations
94
US6287390B2
Sep 11, 2001
Apparatus and method of cleaning nozzle and apparatus of processing substrate
TOKYO ELECTRON LTD
17 citations
91
SHIMOOKA TOSHIHARU
1 patent
US9065116B2
Jun 23, 2015
Lithium secondary battery positive electrode and lithium secondary battery
SHIMOOKA TOSHIHARU
8 citations
77
HITACHI MAXELL
1 patent
US7829061B2
Nov 9, 2010
Zirconium oxide hydrate particles and method for producing the same
HITACHI MAXELL
0 citations
48
HIRASHIGE TAKAYUKI
1 patent
US8163438B2
Apr 24, 2012
Composite electrolyte membrane, production method thereof, membrane-electrode assembly, and fuel cell
HIRASHIGE TAKAYUKI
0 citations
42
KONO SATOSHI
1 patent
US8790829B2
Jul 29, 2014
Nonaqueous secondary battery
KONO SATOSHI
0 citations
35