Inventor

HARPHAM ANDREW JOHN

GB7 patents

⚠️ This page may combine multiple inventors who share the name “HARPHAM ANDREW JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents

US9857699B2Jan 2, 2018

HARPHAM ANDREW JOHN

2 patents

US8830440B2Sep 9, 2014

Vacuum system for immersion photolithography

HARPHAM ANDREW JOHN5 citations79

US8164734B2Apr 24, 2012

Vacuum system for immersion photolithography

HARPHAM ANDREW JOHN9 citations79

EDWARDS LTD

1 patent

US7481867B2Jan 27, 2009

Vacuum system for immersion photolithography

EDWARDS LTD17 citations90

BOC GROUP PLC

1 patent

US7368000B2May 6, 2008

Treatment of effluent gases

BOC GROUP PLC17 citations77