Inventor
MIYASHITA HIROYUKI
JP38 patents
⚠️ This page may combine multiple inventors who share the name “MIYASHITA HIROYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
14 patentsUS9281154B2Mar 8, 2016
Microwave introducing mechanism, microwave plasma source and microwave plasma processing apparatus
TOKYO ELECTRON LTD15 citations84
US9520273B2Dec 13, 2016
Tuner, microwave plasma source and impedance matching method
TOKYO ELECTRON LTD5 citations73
US9520272B2Dec 13, 2016
Microwave emission mechanism, microwave plasma source and surface wave plasma processing apparatus
TOKYO ELECTRON LTD3 citations73
US9702913B2Jul 11, 2017
Acquisition method for S-parameters in microwave introduction modules, and malfunction detection method
TOKYO ELECTRON LTD2 citations72
US11749511B2Sep 5, 2023
Plasma observation system and plasma observation method
TOKYO ELECTRON LTD2 citations70
US12463013B2Nov 4, 2025
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations62
US12482637B2Nov 25, 2025
Plasma source and plasma processing apparatus
TOKYO ELECTRON LTD0 citations52
US5880437AMar 9, 1999
Automatic control system and method using same
TOKYO ELECTRON LTD1 citations52
US9548187B2Jan 17, 2017
Microwave radiation antenna, microwave plasma source and plasma processing apparatus
TOKYO ELECTRON LTD1 citations51
US12205799B2Jan 21, 2025
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations50
US11569558B2Jan 31, 2023
Directional coupler for use in a substrate processing apparatus, where the directional coupler includes a coaxial line coupled to a conductor on a substrate
TOKYO ELECTRON LTD0 citations50
US11164730B2Nov 2, 2021
Plasma probe device and plasma processing apparatus
TOKYO ELECTRON LTD0 citations50
US11488847B2Nov 1, 2022
Apparatus and method for heat-treating substrate
TOKYO ELECTRON LTD0 citations48
US9704693B2Jul 11, 2017
Power combiner and microwave introduction mechanism
TOKYO ELECTRON LTD0 citations42
DAINIPPON PRINTING CO LTD
13 patentsUS5723234AMar 3, 1998
Phase shift photomask and phase shift photomask dry etching method
DAINIPPON PRINTING CO LTD53 citations96
US5538816AJul 23, 1996
Halftone phase shift photomask, halftone phase shift photomask blank, and methods of producing the same
DAINIPPON PRINTING CO LTD72 citations96
US5702847ADec 30, 1997
Phase shift photomask, phase shift photomask blank, and process for fabricating them
DAINIPPON PRINTING CO LTD55 citations94
US5916712AJun 29, 1999
Halftone phase shift photomask, halftone phase shift photomask blank, and method of producing the same
DAINIPPON PRINTING CO LTD19 citations92
US5738959AApr 14, 1998
Halftone phase shift photomask, halftone phase shift photomask blank, and method of producing the same comprising fluorine in phase shift layer
DAINIPPON PRINTING CO LTD21 citations92
US5688617ANov 18, 1997
Phase shift layer-containing photomask, and its production and correction
DAINIPPON PRINTING CO LTD24 citations92
US5614335AMar 25, 1997
Blanks for halftone phase shift photomasks, halftone phase shift photomasks, and methods for fabricating them
DAINIPPON PRINTING CO LTD20 citations92
US5380608AJan 10, 1995
Phase shift photomask comprising a layer of aluminum oxide with magnesium oxide
DAINIPPON PRINTING CO LTD30 citations92
US5614336AMar 25, 1997
Phase shift layer-containing photomask, and its production and correction
DAINIPPON PRINTING CO LTD16 citations81
US5721075AFeb 24, 1998
Blanks for halftone phase shift photomasks, halftone phase shift photomasks, and methods for fabricating them
DAINIPPON PRINTING CO LTD13 citations74
US5561009AOct 1, 1996
Blanks for phase shift photomasks, and phase shift photomasks
DAINIPPON PRINTING CO LTD15 citations72
US5604060AFeb 18, 1997
Halftone phase shift photomask comprising a single layer of halftone light blocking and phase shifting
DAINIPPON PRINTING CO LTD10 citations71
US5576123ANov 19, 1996
Overlying shifter type phase shift photomask blank, overlying shifter type phase shift photomask and methods of producing them
DAINIPPON PRINTING CO LTD4 citations63