Inventor
CAMPEAU SERGE M
US6 patents
⚠️ This page may combine multiple inventors who share the name “CAMPEAU SERGE M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SINHA ASHWINI K
3 patentsUS9548181B2Jan 17, 2017
Boron-containing dopant compositions, systems and methods of use thereof for improving ion beam current and performance during boron ion implantation
SINHA ASHWINI K5 citations81
US9552990B2Jan 24, 2017
Storage and sub-atmospheric delivery of dopant compositions for carbon ion implantation
SINHA ASHWINI K2 citations68
US9570271B2Feb 14, 2017
Boron-containing dopant compositions, systems and methods of use thereof for improving ion beam current and performance during boron ion implantation
SINHA ASHWINI K1 citations60