P

Inventor

SUNG EDWARD

US11 patents
⚠️ This page may combine multiple inventors who share the name “SUNG EDWARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

5 patents
US10023959B2Jul 17, 2018

Anti-transient showerhead

LAM RES CORP20 citations92
US9982341B2May 29, 2018

Modular vaporizer

LAM RES CORP7 citations83
US10494717B2Dec 3, 2019

Anti-transient showerhead

LAM RES CORP13 citations82
US10107490B2Oct 23, 2018

Configurable liquid precursor vaporizer

LAM RES CORP0 citations39
US9863041B2Jan 9, 2018

Internally heated porous filter for defect reduction with liquid or solid precursors

LAM RES CORP0 citations39

SOLARCITY CORP

3 patents
US9748434B1Aug 29, 2017

Systems, method and apparatus for curing conductive paste

SOLARCITY CORP4 citations66
US10014201B1Jul 3, 2018

Magnetic wafer gripper

SOLARCITY CORP0 citations49
US10074765B2Sep 11, 2018

Systems, method and apparatus for curing conductive paste

SOLARCITY CORP0 citations45

SAMSUNG ELECTRONICS CO LTD

2 patents
US11035040B2Jun 15, 2021

Showerhead and substrate processing apparatus

SAMSUNG ELECTRONICS CO LTD0 citations62
US10950419B2Mar 16, 2021

Shrouds and substrate treating systems including the same

SAMSUNG ELECTRONICS CO LTD0 citations51

SUN CHEMICAL CORP

1 patent
US6494949B2Dec 17, 2002

Process for the preparation of beta-phase quinacridone

SUN CHEMICAL CORP0 citations45