P

Inventor

SHEN YUN-HUNG

TW28 patents
⚠️ This page may combine multiple inventors who share the name “SHEN YUN-HUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

17 patents
US6693038B1Feb 17, 2004

Method for forming electrical contacts through multi-level dielectric layers by high density plasma etching

TAIWAN SEMICONDUCTOR MFG29 citations92
US6228731B1May 8, 2001

Re-etched spacer process for a self-aligned structure

TAIWAN SEMICONDUCTOR MFG56 citations92
US6194302B1Feb 27, 2001

Integrated process flow to improve the electrical isolation within self aligned contact structure

TAIWAN SEMICONDUCTOR MFG31 citations92
US5923986AJul 13, 1999

Method of forming a wide upper top spacer to prevent salicide bridge

TAIWAN SEMICONDUCTOR MFG26 citations92
US6203659B1Mar 20, 2001

Method and apparatus for controlling the quality of a photoresist stripper bath

TAIWAN SEMICONDUCTOR MFG20 citations89
US5776832AJul 7, 1998

Anti-corrosion etch process for etching metal interconnections extending over and within contact openings

TAIWAN SEMICONDUCTOR MFG21 citations89
US6924221B2Aug 2, 2005

Integrated process flow to improve copper filling in a damascene structure

TAIWAN SEMICONDUCTOR MFG17 citations84
US6826828B1Dec 7, 2004

Electrostatic discharge-free container comprising a cavity surrounded by surfaces of PMMA-poly covered metal-PMMA

TAIWAN SEMICONDUCTOR MFG19 citations84
US6486067B1Nov 26, 2002

Method for improving the electrical isolation between the contact and gate in a self-aligned contact MOSFET device structure

TAIWAN SEMICONDUCTOR MFG18 citations80
US6475917B1Nov 5, 2002

Method to reduce the metal TiN ARC damage in etching back process

TAIWAN SEMICONDUCTOR MFG12 citations73
US6083834AJul 4, 2000

Zincate catalysis electroless metal deposition for via metal interconnection

TAIWAN SEMICONDUCTOR MFG11 citations72
US5854134ADec 29, 1998

Passivation layer for a metal film to prevent metal corrosion

TAIWAN SEMICONDUCTOR MFG15 citations71
US6184116B1Feb 6, 2001

Method to fabricate the MOS gate

TAIWAN SEMICONDUCTOR MFG10 citations68
US6103633AAug 15, 2000

Method for cleaning metal precipitates in semiconductor processes

TAIWAN SEMICONDUCTOR MFG6 citations63
US5804492ASep 8, 1998

Method of fabricating an isolation region for semiconductor device

TAIWAN SEMICONDUCTOR MFG5 citations63
US7067433B2Jun 27, 2006

Method to reduce the fluorine contamination on the Al/Al-Cu pad by a post high cathod temperature plasma treatment

TAIWAN SEMICONDUCTOR MFG3 citations56
US6819417B1Nov 16, 2004

In-line monitoring of silicide quality using non-destructive methods

TAIWAN SEMICONDUCTOR MFG0 citations42

MSTAR SEMICONDUCTOR INC

3 patents

SHEN YUN-HUNG

3 patents

HON HAI PREC IND CO LTD

1 patent

CHEN YI-FAN

1 patent

LEE WEI-KUO

1 patent

CHEN JIUNN-KUANG

1 patent

JONG HER-MING

1 patent