Inventor
LIN YU-FU
TW14 patents
⚠️ This page may combine multiple inventors who share the name “LIN YU-FU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
9 patentsUS10156794B1Dec 18, 2018
Positioning device for aligning semiconductor tool and overhead hoist transport system
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations83
US10627728B2Apr 21, 2020
Method for creating vacuum in load lock chamber
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US12276923B2Apr 15, 2025
Exhaust system with U-shaped pipes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11994809B2May 28, 2024
Exhaust system with u-shaped pipes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11681232B2Jun 20, 2023
Exhaust system with u-shaped pipes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10983447B2Apr 20, 2021
Exhaust system with u-shaped pipes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11054756B2Jul 6, 2021
Apparatus and method for cleaning reticle stage
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US9640397B2May 2, 2017
Method of fabricating a semiconductor integrated circuit using a directed self-assembly block copolymer
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations52
US10684559B2Jun 16, 2020
Apparatus and method for cleaning reticle stage
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50