Inventor
NISHIKAWA NOBUYUKI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “NISHIKAWA NOBUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
7 patentsUS6087261AJul 11, 2000
Method for production of semiconductor device
FUJITSU LTD59 citations95
US7256500B2Aug 14, 2007
Semiconductor device using metal nitride as insulating film
FUJITSU LTD6 citations73
US7042093B2May 9, 2006
Semiconductor device using metal nitride as insulating film
FUJITSU LTD7 citations73
US6873002B2Mar 29, 2005
Semiconductor memory device having cylinder-type stacked capacitor and method for fabricating such a semiconductor memory device
FUJITSU LTD5 citations71
US7102189B2Sep 5, 2006
Semiconductor device suitable for forming conductive film such as platinum with good coverage, and its manufacture
FUJITSU LTD4 citations61
US7470595B2Dec 30, 2008
Oxidizing a metal layer for a dielectric having a platinum electrode
FUJITSU LTD0 citations51
US7381614B2Jun 3, 2008
Method for fabricating a semiconductor memory device that includes silicidizing a portion of a platinum group layer to form a silicide region and selectively removing the silicide region to define a bottom electrode of a capacitor
FUJITSU LTD1 citations50