Inventor

PETERSON MARIA L

US5 patents

⚠️ This page may combine multiple inventors who share the name “PETERSON MARIA L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EKC TECHNOLOGY INC

2 patents

US6313039B1Nov 6, 2001

Chemical mechanical polishing composition and process

EKC TECHNOLOGY INC125 citations97

US6117783ASep 12, 2000

Chemical mechanical polishing composition and process

EKC TECHNOLOGY INC240 citations97

DUPONT AIR PROD NANOMATERIALS

2 patents

US7276180B2Oct 2, 2007

Chemical mechanical polishing composition and process

DUPONT AIR PROD NANOMATERIALS4 citations72

US7033942B2Apr 25, 2006

Chemical mechanical polishing composition and process

DUPONT AIR PROD NANOMATERIALS8 citations72

DUPONT AIRPRODUCTS NANOMATERIA

1 patent

US7314823B2Jan 1, 2008

Chemical mechanical polishing composition and process

DUPONT AIRPRODUCTS NANOMATERIA4 citations68