Inventor
HUANG YAI-YEI
TW4 patents
Patents
4 patentsUS6936544B2Aug 30, 2005
Method of removing metal etching residues following a metal etchback process to improve a CMP process
TAIWAN SEMICONDUCTOR MFG105 citations95
US7118451B2Oct 10, 2006
CMP apparatus and process sequence method
TAIWAN SEMICONDUCTOR MFG20 citations89
US7004814B2Feb 28, 2006
CMP process control method
TAIWAN SEMICONDUCTOR MFG11 citations82
US7294043B2Nov 13, 2007
CMP apparatus and process sequence method
TAIWAN SEMICONDUCTOR MFG4 citations59