Inventor · disambiguated record
Yasunari Soda
Also filed as: SODA YASUNARI
6 granted patents·58 citations·filing 1985–2005
82Inventor score
Top patents by PatentIndex Score
6 records- 0191US7408760B2Charged particle beam application systemHITACHI HIGH TECH CORP·Filed 2005·Granted Aug 5, 2008·21 cites·12 claims
- 0261US5017458AMethod for production of graft copolymer, pattern replication method, and base polymer and resist for graft copolymerizationHITACHI LTD·Filed 1989·Granted May 21, 1991·13 cites·9 claims
- 0344US4981771APattern fabricating methodHITACHI LTD·Filed 1989·Granted Jan 1, 1991·7 cites·5 claims
- 0439US4701940ALinearly polarized X-ray patterning processHITACHI LTD·Filed 1985·Granted Oct 20, 1987·6 cites·5 claims
- 0538US4960676AMethod for forming pattern by using graft copolymerizationHITACHI LTD·Filed 1988·Granted Oct 2, 1990·7 cites·2 claims
- 0638US4954424APattern fabrication by radiation-induced graft copolymerizationHITACHI LTD·Filed 1988·Granted Sep 4, 1990·4 cites·13 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →