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Inventor
ZHOU ZAIFA
CN
2 patents
Patents
2 patents
US10088375B2
Oct 2, 2018
Thin film material residual stress testing structure and method
UNIV SOUTHEAST
1 citations
48
US11002710B2
May 11, 2021
Method and device for measuring mechanical parameters of multilayer composite thin film structure
UNIV SOUTHEAST
0 citations
40