Inventor
TSUNEKAWA KOJI
JP28 patents
⚠️ This page may combine multiple inventors who share the name “TSUNEKAWA KOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON ANELVA CORP
14 patentsUS8377270B2Feb 19, 2013
Plasma processing apparatus, magnetoresistive device manufacturing apparatus, magnetic thin film forming method, and film formation control program
CANON ANELVA CORP7 citations84
US7813088B2Oct 12, 2010
Magnetoresistance effect device
CANON ANELVA CORP13 citations81
US9752226B2Sep 5, 2017
Manufacturing apparatus
CANON ANELVA CORP2 citations73
US7603763B2Oct 20, 2009
Method for manufacturing a magnetoresistive multilayer film
CANON ANELVA CORP7 citations71
US9991102B2Jun 5, 2018
Sputtering apparatus, film deposition method, and control device
CANON ANELVA CORP3 citations70
US9039873B2May 26, 2015
Manufacturing apparatus
CANON ANELVA CORP3 citations62
US8934290B2Jan 13, 2015
Magnetoresistance effect device and method of production of the same
CANON ANELVA CORP3 citations61
US10636634B2Apr 28, 2020
Sputtering apparatus, film deposition method, and control device
CANON ANELVA CORP1 citations60
US7771570B2Aug 10, 2010
Method and apparatus for depositing a magnetoresistive multilayer film
CANON ANELVA CORP1 citations60
US7652852B2Jan 26, 2010
Magnetoresistance effect device and a preform therefor
CANON ANELVA CORP3 citations60
US9449800B2Sep 20, 2016
Sputtering apparatus and sputtering method
CANON ANELVA CORP0 citations52
US8367156B2Feb 5, 2013
Method of manufacturing magnetoresistive device and apparatus for manufacturing the same
CANON ANELVA CORP0 citations51
US7727409B2Jun 1, 2010
Magnetoresistance effect device and method of production thereof
CANON ANELVA CORP1 citations50
US10378100B2Aug 13, 2019
Sputtering apparatus and recording medium for recording control program thereof
CANON ANELVA CORP0 citations41
TSUNEKAWA KOJI
5 patentsUS8837924B2Sep 16, 2014
Vacuum heating/cooling apparatus and manufacturing method of magnetoresistance element
TSUNEKAWA KOJI14 citations83
US8118981B2Feb 21, 2012
Sputtering apparatus and method for controlling the same
TSUNEKAWA KOJI7 citations83
US8139325B2Mar 20, 2012
Tunnel magnetoresistive thin film
TSUNEKAWA KOJI17 citations82
US8174800B2May 8, 2012
Magnetoresistive element, method of manufacturing the same, and magnetic multilayered film manufacturing apparatus
TSUNEKAWA KOJI7 citations81
US8932438B2Jan 13, 2015
Method of manufacturing magnetoresistive element, sputter deposition chamber, apparatus for manufacturing magnetoresistive element having sputter deposition chamber, program and storage medium
TSUNEKAWA KOJI6 citations71
ANELVA CORP
4 patentsUS6641703B2Nov 4, 2003
Magnetic multi-layer film manufacturing apparatus
ANELVA CORP38 citations91
US6720036B2Apr 13, 2004
Method of production of spin valve type giant magnetoresistive thin film
ANELVA CORP14 citations84
US6610373B2Aug 26, 2003
Magnetic film-forming device and method
ANELVA CORP4 citations63
US7914654B2Mar 29, 2011
Method and apparatus for depositing a magnetoresistive multilayer film
ANELVA CORP4 citations60