Inventor
PORSHNEV PETER
US10 patents
⚠️ This page may combine multiple inventors who share the name “PORSHNEV PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS6828241B2Dec 7, 2004
Efficient cleaning by secondary in-situ activation of etch precursor from remote plasma source
APPLIED MATERIALS INC144 citations96
US7160521B2Jan 9, 2007
Treatment of effluent from a substrate processing chamber
APPLIED MATERIALS INC52 citations89
US7970483B2Jun 28, 2011
Methods and apparatus for improving operation of an electronic device manufacturing system
APPLIED MATERIALS INC8 citations82
US7838399B2Nov 23, 2010
Plasma immersed ion implantation process using balanced etch-deposition process
APPLIED MATERIALS INC1 citations62
US7532952B2May 12, 2009
Methods and apparatus for pressure control in electronic device manufacturing systems
APPLIED MATERIALS INC3 citations61
US7601264B2Oct 13, 2009
Method for treatment of plating solutions
APPLIED MATERIALS INC3 citations58
VEECO INSTR INC
2 patentsUS10128083B2Nov 13, 2018
Ion sources and methods for generating ion beams with controllable ion current density distributions over large treatment areas
VEECO INSTR INC4 citations69
US10014164B2Jul 3, 2018
Ion beam materials processing system with grid short clearing system for gridded ion beam source
VEECO INSTR INC6 citations67