Inventor
VIA GIORGIO G
US5 patents
Patents
5 patentsUS5087537AFeb 11, 1992
Lithography imaging tool and related photolithographic processes
IBM55 citations87
US4567132AJan 28, 1986
Multi-level resist image reversal lithography process
IBM33 citations87
US5258264ANov 2, 1993
Process of forming a dual overhang collimated lift-off stencil with subsequent metal deposition
IBM18 citations73
US5024896AJun 18, 1991
Collimated metal deposition
IBM16 citations73
US4745045AMay 17, 1988
Method for improving resolution in microelectronic circuits using photoresist overlayer by using thermally processed polyimide underlayer formed from positive photoresist and polyamic acid
IBM17 citations71