Inventor
HAFFNER HENNING
US40 patents
⚠️ This page may combine multiple inventors who share the name “HAFFNER HENNING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
22 patentsUS6421820B1Jul 16, 2002
Semiconductor device fabrication using a photomask with assist features
INFINEON TECHNOLOGIES AG293 citations99
US7785946B2Aug 31, 2010
Integrated circuits and methods of design and manufacture thereof
INFINEON TECHNOLOGIES AG30 citations96
US7221788B2May 22, 2007
Method of inspecting a mask or reticle for detecting a defect, and mask or reticle inspection system
INFINEON TECHNOLOGIES AG21 citations92
US6631511B2Oct 7, 2003
Generating mask layout data for simulation of lithographic processes
INFINEON TECHNOLOGIES AG48 citations90
US6571383B1May 27, 2003
Semiconductor device fabrication using a photomask designed using modeling and empirical testing
INFINEON TECHNOLOGIES AG27 citations90
US7947431B2May 24, 2011
Lithography masks and methods of manufacture thereof
INFINEON TECHNOLOGIES AG7 citations83
US7094674B2Aug 22, 2006
Method for production of contacts on a wafer
INFINEON TECHNOLOGIES AG13 citations81
US9767244B2Sep 19, 2017
Integrated circuits and methods of design and manufacture thereof
INFINEON TECHNOLOGIES AG2 citations73
US6353248B1Mar 5, 2002
Optimized decoupling capacitor using lithographic dummy filler
INFINEON TECHNOLOGIES AG11 citations73
US7945869B2May 17, 2011
Mask and method for patterning a semiconductor wafer
INFINEON TECHNOLOGIES AG5 citations63
US7669176B2Feb 23, 2010
System and method for semiconductor device fabrication using modeling
INFINEON TECHNOLOGIES AG2 citations63
US7669173B2Feb 23, 2010
Semiconductor mask and method of making same
INFINEON TECHNOLOGIES AG3 citations63
US9437593B2Sep 6, 2016
Silicided semiconductor structure and method of forming the same
INFINEON TECHNOLOGIES AG2 citations62
US8039203B2Oct 18, 2011
Integrated circuits and methods of design and manufacture thereof
INFINEON TECHNOLOGIES AG3 citations62
US7799486B2Sep 21, 2010
Lithography masks and methods of manufacture thereof
INFINEON TECHNOLOGIES AG2 citations62
US6756164B2Jun 29, 2004
Exposure mask with repaired dummy structure and method of repairing an exposure mask
INFINEON TECHNOLOGIES AG6 citations60
US6586308B2Jul 1, 2003
Method for producing circuit structures on a semiconductor substrate and semiconductor configuration with functional circuit structures and dummy circuit structures
INFINEON TECHNOLOGIES AG2 citations57
US7124379B2Oct 17, 2006
Method for communicating a measuring position of a structural element that is to be formed on a mask
INFINEON TECHNOLOGIES AG4 citations55
US10089430B2Oct 2, 2018
Integrated circuits and methods of design and manufacture thereof
INFINEON TECHNOLOGIES AG0 citations52
US9324707B2Apr 26, 2016
Integrated circuits and methods of design and manufacture thereof
INFINEON TECHNOLOGIES AG0 citations52
US7056628B2Jun 6, 2006
Mask for projecting a structure pattern onto a semiconductor substrate
INFINEON TECHNOLOGIES AG1 citations52
US7304721B2Dec 4, 2007
Method for dynamically monitoring a reticle
INFINEON TECHNOLOGIES AG4 citations51
HAFFNER HENNING
6 patentsUS8809958B2Aug 19, 2014
Integrated circuits and methods of design and manufacture thereof
HAFFNER HENNING3 citations73
US8078998B2Dec 13, 2011
Integrated circuits and methods of design and manufacture thereof
HAFFNER HENNING5 citations73
US8298953B2Oct 30, 2012
Method for defining a separating structure within a semiconductor device
HAFFNER HENNING2 citations62
US9202710B2Dec 1, 2015
Method for defining a separating structure within a semiconductor device
HAFFNER HENNING0 citations51
US8426114B2Apr 23, 2013
L-shaped feature, method of making an L-shaped feature and method of making an L-shaped structure
HAFFNER HENNING0 citations51
US8092958B2Jan 10, 2012
Mask and method for patterning a semiconductor wafer
HAFFNER HENNING1 citations51
IBM
4 patentsUS6426269B1Jul 30, 2002
Dummy feature reduction using optical proximity effect correction
IBM210 citations99
US8365108B2Jan 29, 2013
Generating cut mask for double-patterning process
IBM20 citations92
US6436585B1Aug 20, 2002
Method of using optical proximity effects to create electrically blown fuses with sub-critical dimension neck downs
IBM8 citations70
US7975246B2Jul 5, 2011
MEEF reduction by elongation of square shapes
IBM1 citations45