Inventor
IWASAKI JUNJI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “IWASAKI JUNJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
8 patentsUS6134482AOct 17, 2000
Method and apparatus for controlling semiconductor wafer fabrication equipment based on a remaining process time applicable to the processors
MITSUBISHI ELECTRIC CORP115 citations97
US6050768AApr 18, 2000
Automatic carrier control method in semiconductor wafer cassette transportation apparatus
MITSUBISHI ELECTRIC CORP87 citations95
US6169935B1Jan 2, 2001
Control method of stocker entry task and stocker exit task in semiconductor wafer cassette transportation apparatus
MITSUBISHI ELECTRIC CORP62 citations94
US6129496AOct 10, 2000
Semiconductor wafer cassette transportation apparatus and stocker used therein
MITSUBISHI ELECTRIC CORP78 citations94
US6351686B1Feb 26, 2002
Semiconductor device manufacturing apparatus and control method thereof
MITSUBISHI ELECTRIC CORP53 citations92
US6151533ANov 21, 2000
Collation method of stocker storage in semiconductor wafer cassette transportation apparatus
MITSUBISHI ELECTRIC CORP17 citations90
US5383482AJan 24, 1995
Semiconductor processing apparatus and module
MITSUBISHI ELECTRIC CORP17 citations82
US5470392ANov 28, 1995
Semiconductor device processing method
MITSUBISHI ELECTRIC CORP4 citations62