Inventor

SASABE KENICHI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “SASABE KENICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

2 patents

US6634924B1Oct 21, 2003

Polishing apparatus

EBARA CORP52 citations92

US6558518B1May 6, 2003

Method and apparatus for plating substrate and plating facility

EBARA CORP36 citations91

TOSHIBA KK

1 patent

US6997778B2Feb 14, 2006

Polishing apparatus

TOSHIBA KK8 citations70