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Inventor
KOJIMA YASUHISA
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “KOJIMA YASUHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
1 patent
US6634924B1
Oct 21, 2003
Polishing apparatus
EBARA CORP
52 citations
92
TOSHIBA KK
1 patent
US6997778B2
Feb 14, 2006
Polishing apparatus
TOSHIBA KK
8 citations
70