Inventor
SUN FRED
US4 patents
Patents
4 patentsUS6811474B2Nov 2, 2004
Polishing composition containing conducting polymer
CABOT MICROELECTRONICS CORP20 citations91
US7021993B2Apr 4, 2006
Method of polishing a substrate with a polishing system containing conducting polymer
CABOT MICROELECTRONICS CORP5 citations61
US9828574B2Nov 28, 2017
Cleaning composition and method for cleaning semiconductor wafers after CMP
CABOT MICROELECTRONICS CORP0 citations43
US10100272B2Oct 16, 2018
Cleaning composition following CMP and methods related thereto
CABOT MICROELECTRONICS CORP0 citations37