Inventor
LUO QIULIANG
US5 patents
⚠️ This page may combine multiple inventors who share the name “LUO QIULIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
RODEL INC
4 patentsUS6524168B2Feb 25, 2003
Composition and method for polishing semiconductors
RODEL INC24 citations91
US6447373B1Sep 10, 2002
Chemical mechanical polishing slurries for metal
RODEL INC21 citations91
US6419553B2Jul 16, 2002
Methods for break-in and conditioning a fixed abrasive polishing pad
RODEL INC19 citations88
US6676718B2Jan 13, 2004
Polishing of semiconductor substrates
RODEL INC22 citations86