Inventor
VOGELSANG PATRICK DAVID
NL3 patents
⚠️ This page may combine multiple inventors who share the name “VOGELSANG PATRICK DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
2 patentsUS7830495B2Nov 9, 2010
Lithographic apparatus and position sensor
ASML NETHERLANDS BV4 citations58
US8384879B2Feb 26, 2013
Optical position sensor, a position sensitive detector, a lithographic apparatus and a method for determining an absolute position of a movable object to be used in a relative position measurement system
ASML NETHERLANDS BV1 citations48