Inventor
REIJNEN MARTINUS CORNELIS
NL6 patents
⚠️ This page may combine multiple inventors who share the name “REIJNEN MARTINUS CORNELIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS9488465B2Nov 8, 2016
Level sensor, a method for determining a height map of a substrate using a selected resolution, and a lithographic apparatus
ASML NETHERLANDS BV8 citations80
US11327412B2May 10, 2022
Topography measurement system
ASML NETHERLANDS BV1 citations60
US7830495B2Nov 9, 2010
Lithographic apparatus and position sensor
ASML NETHERLANDS BV4 citations58
US8384879B2Feb 26, 2013
Optical position sensor, a position sensitive detector, a lithographic apparatus and a method for determining an absolute position of a movable object to be used in a relative position measurement system
ASML NETHERLANDS BV1 citations48
US7321416B2Jan 22, 2008
Lithographic apparatus, device manufacturing method, device manufactured thereby, and controllable patterning device utilizing a spatial light modulator with distributed digital to analog conversion
ASML NETHERLANDS BV1 citations46