Inventor

AIDA TOSHIHIRO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “AIDA TOSHIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DOBASHI KAZUYA

1 patent

US9214364B2Dec 15, 2015

Substrate cleaning apparatus and vacuum processing system

DOBASHI KAZUYA3 citations57

DISCO CORP

1 patent

US9159622B2Oct 13, 2015

Dividing method for wafer

DISCO CORP1 citations44

IWATANI CORP

1 patent

US9533268B2Jan 3, 2017

Method and apparatus for supplying mixed gas

IWATANI CORP0 citations34