P

Inventor

REA MARK L

US7 patents
⚠️ This page may combine multiple inventors who share the name “REA MARK L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

3 patents
US7449098B1Nov 11, 2008

Method for planar electroplating

NOVELLUS SYSTEMS INC110 citations97
US7091134B1Aug 15, 2006

Deposition of integrated circuit fabrication materials using a print head

NOVELLUS SYSTEMS INC20 citations89
US6764168B1Jul 20, 2004

Sensor for detecting droplet characteristics

NOVELLUS SYSTEMS INC26 citations89

MAYER STEVEN T

2 patents
US8158532B2Apr 17, 2012

Topography reduction and control by selective accelerator removal

MAYER STEVEN T44 citations97
US8470191B2Jun 25, 2013

Topography reduction and control by selective accelerator removal

MAYER STEVEN T19 citations92

LAM RES CORP

2 patents
US9607822B2Mar 28, 2017

Pretreatment method for photoresist wafer processing

LAM RES CORP11 citations83
US9469912B2Oct 18, 2016

Pretreatment method for photoresist wafer processing

LAM RES CORP5 citations72