Inventor
SCHOEPPACH ARMIN
DE31 patents
⚠️ This page may combine multiple inventors who share the name “SCHOEPPACH ARMIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
12 patentsUS9175948B2Nov 3, 2015
Optical module with a measuring device
ZEISS CARL SMT GMBH4 citations72
US9341807B2May 17, 2016
Gravitation compensation for optical elements in projection exposure apparatuses
ZEISS CARL SMT GMBH3 citations71
US9604299B2Mar 28, 2017
Method and device for connecting an optical element to a frame
ZEISS CARL SMT GMBH2 citations68
US9557653B2Jan 31, 2017
Optical projection system
ZEISS CARL SMT GMBH1 citations62
US9104016B2Aug 11, 2015
Optical projection system
ZEISS CARL SMT GMBH2 citations62
US7920344B2Apr 5, 2011
Arrangement for mounting an optical element
ZEISS CARL SMT GMBH2 citations58
US9766550B2Sep 19, 2017
Actuators and microlithography projection exposure systems and methods using the same
ZEISS CARL SMT GMBH0 citations52
US8659745B2Feb 25, 2014
Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations
ZEISS CARL SMT GMBH1 citations52
US9891535B2Feb 13, 2018
Optical projection system
ZEISS CARL SMT GMBH0 citations51
US9195145B2Nov 24, 2015
Microlithographic imaging optical system including multiple mirrors
ZEISS CARL SMT GMBH0 citations51
US9513562B2Dec 6, 2016
Projection exposure apparatus for microlithography for the production of semiconductor components
ZEISS CARL SMT GMBH0 citations50
US9798243B2Oct 24, 2017
Optical device having a deformable optical element
ZEISS CARL SMT GMBH0 citations49
ZEISS CARL SMT AG
5 patentsUS7729065B2Jun 1, 2010
Optical element unit
ZEISS CARL SMT AG11 citations83
US7079331B2Jul 18, 2006
Device for holding a beam splitter element
ZEISS CARL SMT AG7 citations71
US7239462B2Jul 3, 2007
Objective with at least one optical element
ZEISS CARL SMT AG6 citations62
US7564636B2Jul 21, 2009
Device for preventing the displacement of an optical element
ZEISS CARL SMT AG5 citations60
US7551375B2Jun 23, 2009
Process for connecting an optical element of a microlithographic projection exposure apparatus to a mount, and assembly
ZEISS CARL SMT AG0 citations49
SCHOEPPACH ARMIN
3 patentsUS8705006B2Apr 22, 2014
Method and device for connecting an optical element to a frame
SCHOEPPACH ARMIN6 citations79
US9436101B2Sep 6, 2016
Optical arrangement and microlithographic projection exposure apparatus including same
SCHOEPPACH ARMIN2 citations60
US8339569B2Dec 25, 2012
Temperature-control device for an optical assembly
SCHOEPPACH ARMIN2 citations60