Inventor
XALTER STEFAN
DE34 patents
⚠️ This page may combine multiple inventors who share the name “XALTER STEFAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
12 patentsUS9897925B2Feb 20, 2018
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH1 citations62
US9239229B2Jan 19, 2016
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH1 citations62
US7929227B2Apr 19, 2011
Optical assembly
ZEISS CARL SMT GMBH4 citations62
US12222655B2Feb 11, 2025
Stop, optical system and lithography apparatus
ZEISS CARL SMT GMBH0 citations58
US11281114B2Mar 22, 2022
Projection exposure apparatus for semiconductor lithography
ZEISS CARL SMT GMBH0 citations58
US9019475B2Apr 28, 2015
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations52
US9001309B2Apr 7, 2015
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations52
US8659745B2Feb 25, 2014
Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations
ZEISS CARL SMT GMBH1 citations52
US10139733B2Nov 27, 2018
Diaphragm changing device
ZEISS CARL SMT GMBH0 citations51
US10571813B2Feb 25, 2020
Connection arrangement for a force-fit connection between ceramic components
ZEISS CARL SMT GMBH0 citations46
US8018664B2Sep 13, 2011
Housing structure
ZEISS CARL SMT GMBH1 citations43
US9804500B2Oct 31, 2017
Optical imaging arrangement with simplified manufacture
ZEISS CARL SMT GMBH0 citations41
ZEISS CARL SMT AG
7 patentsUS6897599B2May 24, 2005
System for damping oscillations
ZEISS CARL SMT AG20 citations92
US6844994B2Jan 18, 2005
Optical element deformation system
ZEISS CARL SMT AG34 citations92
US6700715B2Mar 2, 2004
Oscillation damping system
ZEISS CARL SMT AG16 citations84
US7760327B2Jul 20, 2010
Reflecting optical element with eccentric optical passageway
ZEISS CARL SMT AG8 citations82
US7791826B2Sep 7, 2010
Optical assembly
ZEISS CARL SMT AG6 citations73
US7589921B2Sep 15, 2009
Actuator device
ZEISS CARL SMT AG5 citations63
US7684125B2Mar 23, 2010
Diaphragm changing device
ZEISS CARL SMT AG4 citations59
ZEISS STIFTUNG
6 patentsUS6504597B2Jan 7, 2003
Optical arrangement
ZEISS STIFTUNG54 citations96
US6781668B2Aug 24, 2004
Optical arrangement
ZEISS STIFTUNG36 citations92
US6583850B2Jun 24, 2003
Optical system
ZEISS STIFTUNG21 citations92
US6521877B1Feb 18, 2003
Optical arrangement having improved temperature distribution within an optical element
ZEISS STIFTUNG37 citations92
US6522392B1Feb 18, 2003
Optical systems and methods of compensating rotationally non-symmetrical image defects in an optical system
ZEISS STIFTUNG34 citations92
US6466382B2Oct 15, 2002
Optical arrangement
ZEISS STIFTUNG26 citations92
XALTER STEFAN
2 patentsUS9013684B2Apr 21, 2015
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus
XALTER STEFAN17 citations91
US8339577B2Dec 25, 2012
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus
XALTER STEFAN9 citations82