Inventor

GREENE JOHN D

US9 patents

⚠️ This page may combine multiple inventors who share the name “GREENE JOHN D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

2 patents

US8362425B2Jan 29, 2013

Multiple-beam system for high-speed electron-beam inspection

KLA TENCOR CORP68 citations97

USRE37740EJun 11, 2002

Method and apparatus for optical inspection of substrates

KLA TENCOR CORP26 citations91

CHADWICK CURT H

2 patents

US5131755AJul 21, 1992

Automatic high speed optical inspection system

CHADWICK CURT H83 citations93

US5085517AFeb 4, 1992

Automatic high speed optical inspection system

CHADWICK CURT H65 citations91

KLA TENCOR TECH CORP

2 patents

US6833913B1Dec 21, 2004

Apparatus and methods for optically inspecting a sample for anomalies

KLA TENCOR TECH CORP44 citations89

US7012683B2Mar 14, 2006

Apparatus and methods for optically inspecting a sample for anomalies

KLA TENCOR TECH CORP13 citations80

KLA INSTR CORP

1 patent

US4877326AOct 31, 1989

Method and apparatus for optical inspection of substrates

KLA INSTR CORP263 citations97

JIANG XINRONG

1 patent

US8664594B1Mar 4, 2014

Electron-optical system for high-speed and high-sensitivity inspections

JIANG XINRONG120 citations96

GREENE JOHN D

1 patent

US9780004B2Oct 3, 2017

Methods and apparatus for optimization of inspection speed by generation of stage speed profile and selection of care areas for automated wafer inspection

GREENE JOHN D1 citations45