Inventor
YOSHIOKA MUTSUHIKO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “YOSHIOKA MUTSUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JSR CORP
6 patentsUS6890605B2May 10, 2005
Method of film formation, insulating film, and substrate for semiconductor
JSR CORP19 citations83
US7297360B2Nov 20, 2007
Insulation film
JSR CORP14 citations82
US7671609B2Mar 2, 2010
Sheet-like probe, method of producing the probe, and application of the probe
JSR CORP7 citations72
US7189651B2Mar 13, 2007
Stopper for chemical mechanical planarization, method for manufacturing same, and chemical mechanical planarization method
JSR CORP2 citations62
US7737707B2Jun 15, 2010
Sheet-like probe, method of producing the probe, and application of the probe
JSR CORP5 citations61
US7656176B2Feb 2, 2010
Probe member for wafer inspection, probe card for wafer inspection and wafer inspection equipment
JSR CORP5 citations60